| Heat 1 | | time | | L | | 1. Margit Nemesházi |  Hungary | 7.3s | | 3 | | 2. Galina Mitrokhina |  Soviet Union | 7.3s | | 2 | | 3. Mary Rand |  Great Britain | 7.4s | | 5 | | 4. Dorothee Sander |  West Germany | 7.4s | | 1 | | 5. Hannelore Trabert | West Germany | 7.5s | | 6 | | 6. Liljana Petnjarić |  Yugoslavia | 7.5s | | 4 |
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| | First 3 from each Semi advanced to Final. |
| Semi 1 | | time | | | 1. Margit Nemesházi | Hungary | 7.2s | Q, WB | | 2. Mary Rand | Great Britain | 7.4s | Q | | 3. Dorothee Sander | West Germany | 7.4s | q | | 4. Liljana Petnjarić | Yugoslavia | 7.4s | q | | -. Eva Lehocká |  Czechoslovakia | DNS | |
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| Semi 2 | | time | | | 1. Galina Mitrokhina | Soviet Union | 7.3s | Q | | 2. Hannelore Trabert | West Germany | 7.4s | Q | | 3. Ulla-Britt Wieslander |  Sweden | 7.5s | | | 4. Oddrun Hokland |  Norway | 7.7s | | | -. Gundula Diel |  East Germany | DNS | |
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| Heat 1 | | time | | | 1. Ulla-Britt Wieslander | Sweden | 7.5s | Q | | 2. Mary Rand | Great Britain | 7.5s | Q | | 3. Eva Lehocká | Czechoslovakia | 7.5s | q | | 4. Oddrun Hokland | Norway | 7.8s | q |
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| Heat 2 | | time | | | 1. Galina Mitrokhina | Soviet Union | 7.4s | Q | | 2. Hannelore Trabert | West Germany | 7.5s | Q | | 3. Gundula Diel | East Germany | 7.6s | q | | 4. Therese Schueremans |  Belgium | 8.1s | |
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| Heat 3 | | time | | | 1. Margit Nemesházi | Hungary | 7.3s | Q | | 2. Liljana Petnjarić | Yugoslavia | 7.6s | Q | | 3. Dorothee Sander | West Germany | 7.6s | q |
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